Piezocon Gas Concentration Sensor

With over 2 800 installations worldwide the piezocon system.

Piezocon gas concentration sensor.

Piezocon gas concentration sensor and delivery control system data sheet. Wafer scrubber data sheet. As the industry standard for reproducible vapor delivery control of chemical precursor vapors and dopant gases in cvd and. Out of a 1 percent dopant premix the piezocon precision gas mixing system can generate a 50ppm dopant gas mixture with a 0 5ppm or better concentration control tank to tank and over the shelf life of the tank.

The piezocon gas concentration sensor delivery control system has become a standard within the semiconductor equipment industry for accurate monitoring and reproducible delivery control of chemical precursor vapors and of dopant gases to cvd and mocvd process tools. Piezocon is an in line acoustic binary gas concentration sensor used for sensing the ratio of process gas and carrier gas. Get an improved gas mixture concentration with the precision gas mixing system. Apex gas mixing system.

The apex gas mixing system powered by veeco s production proven piezocon gas concentration sensor allows manufacturers to reduce production costs by purchasing lower cost higher concentration gases then diluting at the point of use to immediately reduce gas purchase costs by as much as 60 percent. Piezocon gas concentration sensor. Active control of mixture concentration compensates for changes or drifts in upstream concentration. Dry film resist stripping data sheet.

Piezocon brings critical control to cvd mocvd applications last update. It generates gas mixtures for tighter process read more. Piezocon gas concentration sensor. Apex gas mixing system the apex gas mixing system reduces production costs by allowing you to purchase lower cost higher concentration.

The piezocon gas concentration sensor provides increased yield and is the industry standard for reproducible vapor delivery control of chemical precursor vapors and dopant gases in cvd and mocvd processes. The complete solution for precision point of use gas mixing the apex gas mixing system powered by veeco s production proven piezocon gas concentration sensor allows manufacturers to reduce production costs by purchasing lower cost higher concentration gases then diluting at the point of use to immediately reduce gas purchase costs by as much as 60 percent.